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Millimeter‐wave low‐loss transmission lines and resonators in standard 0.18‐μm CMOS technology
Author(s) -
Lin ShuiYang,
Yang LiWu,
Sun XiaoWei
Publication year - 2008
Publication title -
microwave and optical technology letters
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.304
H-Index - 76
eISSN - 1098-2760
pISSN - 0895-2477
DOI - 10.1002/mop.23424
Subject(s) - resonator , coplanar waveguide , cmos , microwave , extremely high frequency , microstrip , transmission line , electrical engineering , wafer , optoelectronics , materials science , characteristic impedance , electric power transmission , electrical impedance , engineering , optics , physics , telecommunications
Design methodologies of CMOS transmission lines (T‐lines) and resonators at millimeter‐wave frequencies are presented. Three different T‐lines including thin film microstrip line, coplanar waveguide, coplanar waveguide with ground, are designed and fabricated in standard 0.18‐μm CMOS technology. After on‐wafer testing to 40 GHz and SLOT de‐embedding calibration, their S‐parameters are extracted and analyzed. To achieve a small size, meandering quarter‐wavelength line resonator and stepped impedance resonator resonating near 30 GHz are designed, with their Q‐factor of 12 and 10.5, respectively. A good agreement between the predicted and measured results has been observed up to 40 GHz. © 2008 Wiley Periodicals, Inc. Microwave Opt Technol Lett 50: 1579–1582, 2008; Published online in Wiley InterScience (www.interscience.wiley.com). DOI 10.1002/mop.23424