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A novel fabrication technique of FBAR devices for mobile broadband WiMAX applications
Author(s) -
Mai Linh,
Lee Jaeyoung,
Pham VanSu,
Yoon Giwan
Publication year - 2008
Publication title -
microwave and optical technology letters
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.304
H-Index - 76
eISSN - 1098-2760
pISSN - 0895-2477
DOI - 10.1002/mop.23088
Subject(s) - wimax , fabrication , broadband , materials science , microwave , return loss , optoelectronics , electronic engineering , computer science , telecommunications , engineering , wireless , medicine , pathology , antenna (radio) , alternative medicine
In this study, we present a novel fabrication technique of FBAR devices as a feasibility study for mobile broadband WiMAX applications. This novel technique features the formation of very thin‐film Cr adhesion layers between W and SiO 2 film layers in the Bragg reflectors, particularly to enhance the adhesion in‐between. As a result, the resonances were found to occur at 2.7–3.0 GHz. In addition, excellent resonance characteristics were achieved in terms of return loss and Q‐factor. This finding indicates that the proposed fabrication technique can be useful for the future mobile WiMAX applications. © 2007 Wiley Periodicals, Inc. Microwave Opt Technol Lett 50: 375–378, 2008; Published online in Wiley InterScience (www.interscience.wiley.com). DOI 10.1002/mop.23088