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Automated on‐wafer extraction of equivalent‐circuit parameters in thin‐film bulk acoustic wave resonators and substrate
Author(s) -
Campanella Humberto,
Nouet Pascal,
Uranga Arantxa,
de Paco Pedro,
Barniol Nuria,
Esteve Jaume
Publication year - 2008
Publication title -
microwave and optical technology letters
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.304
H-Index - 76
eISSN - 1098-2760
pISSN - 0895-2477
DOI - 10.1002/mop.22986
Subject(s) - resonator , wafer , substrate (aquarium) , microwave , materials science , embedding , extraction (chemistry) , equivalent circuit , thin film , electronic engineering , optoelectronics , acoustics , engineering , electrical engineering , computer science , physics , nanotechnology , telecommunications , chemistry , artificial intelligence , oceanography , chromatography , voltage , geology
Abstract On‐wafer parameter extraction in thin‐film bulk acoustic wave resonator (FBAR) embedded on its substrate is performed. The extraction algorithm implements a multistep least‐squares optimization strategy, obtaining the equivalent‐circuit parameters of both FBAR and its substrate from experimental data. Compared with previous works, the algorithm enables for model‐based de‐embedding of the FBAR parameters. © 2007 Wiley Periodicals, Inc. Microwave Opt Technol Lett 50: 4–7, 2008; Published online in Wiley InterScience (www.interscience.wiley.com). DOI 10.1002/mop.22986