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Characterization of on‐chip miniature multi‐layer spiral inductors for RFICs
Author(s) -
Xie JianYong,
Yin WenYan,
Shi Jinglin,
Kang Kai,
Chen Zhizhang David
Publication year - 2007
Publication title -
microwave and optical technology letters
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.304
H-Index - 76
eISSN - 1098-2760
pISSN - 0895-2477
DOI - 10.1002/mop.22917
Subject(s) - inductor , inductance , equivalent series resistance , equivalent series inductance , spiral (railway) , microwave , electrical engineering , equivalent circuit , cmos , layer (electronics) , skin effect , electronic engineering , engineering , materials science , topology (electrical circuits) , mechanical engineering , telecommunications , voltage , nanotechnology
Several existing closed‐form equations for calculating DC inductance and resistance of single‐spiral inductors are examined at first, and the most accurate formula is chosen for characterizing the DC inductance of multi‐layer spiral inductors. The partial element equivalent circuit (PEEC) method is implemented for computing their frequency‐dependent (AC) resistance and inductance. To validate our calculated results, we designed and fabricated some multi‐layer spiral inductors using standard 0.18 μ m CMOS technology. The on‐chip measurements are carried out so as to obtain two‐port S ‐parameters of these inductors. Excellent agreements are obtained between the calculated and experimental results, which include DC and low‐frequency inductances of three‐, four‐, and fiver‐layer spiral inductors, respectively. © 2007 Wiley Periodicals, Inc. Microwave Opt Technol Lett 49: 2932–2936, 2007; Published online in Wiley InterScience (www.interscience.wiley.com). DOI 10.1002/mop.22917