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Nonlinear actuation model for lateral electrostatically‐actuated DC‐contact RF MEMS series switches
Author(s) -
Lázaro A.,
Girbau D.,
Pradell L.,
Nebot A.
Publication year - 2007
Publication title -
microwave and optical technology letters
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.304
H-Index - 76
eISSN - 1098-2760
pISSN - 0895-2477
DOI - 10.1002/mop.22450
Subject(s) - microelectromechanical systems , nonlinear system , discretization , series (stratigraphy) , microwave , boundary value problem , control theory (sociology) , engineering , physics , electronic engineering , mathematical analysis , computer science , mathematics , optoelectronics , telecommunications , control (management) , quantum mechanics , artificial intelligence , biology , paleontology
In this work, a nonlinear model to predict actuation characteristics in lateral electrostatically‐actuated DC‐contact MEMS switches is proposed. In this case a parallel‐plate approximation cannot be applied. The model is based on the equilibrium equation for an elastic beam. It is demonstrated that the contribution of fringing fields is essential. The model relies on finite‐difference discretization of the structures, applying boundary conditions and is solved with a Gauss‐Seidel relaxation iteration scheme. Its usefulness is demonstrated in a series MEMS switch with lateral interdigital electrostatic actuation. © 2007 Wiley Periodicals, Inc. Microwave Opt Technol Lett 49: 1238–1241, 2007; Published online in Wiley InterScience (www.interscience.wiley.com). DOI 10.1002/mop.22450