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Silicon bulk micromachined electromechanical switches with four cantilever piezoelectric actuators
Author(s) -
Park Jae Yoeng,
Lee Hee Chul,
Yang Chang Soo
Publication year - 2007
Publication title -
microwave and optical technology letters
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.304
H-Index - 76
eISSN - 1098-2760
pISSN - 0895-2477
DOI - 10.1002/mop.22195
Subject(s) - cantilever , microelectromechanical systems , piezoelectricity , microwave , materials science , actuator , silicon , voltage , optoelectronics , electrical engineering , substrate (aquarium) , insertion loss , electronic engineering , engineering , telecommunications , composite material , oceanography , geology
In this article, silicon bulk micromachined RF MEMS switch with four cantilever piezoelectric actuators has been designed, fabricated, and characterized for advanced mobile/wireless communication systems. The proposed switch is comprised of four piezoelectric cantilever actuators, a contact metal pad, and a suspended CPW signal line above the silicon substrate. The fabricated piezoelectric switch has an insertion loss of −0.23 dB and an isolation of −44 dB at a frequency of 2 GHz and an operation voltage of 2.5 V, respectively. Also, it has constant performance characteristics at the certain range of applied voltages above the operation voltage that result in high production yield. © 2007 Wiley Periodicals, Inc. Microwave Opt Technol Lett 49: 570–573, 2007; Published online in Wiley InterScience (www.interscience.wiley.com). DOI 10.1002/mop.22195