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Circuit model and design of silicon‐integrated CRLH‐TLS analogically controlled by MEMS
Author(s) -
PerruisseauCarrier Julien,
Lisec Thomas,
Skrivervik Anja K.
Publication year - 2006
Publication title -
microwave and optical technology letters
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.304
H-Index - 76
eISSN - 1098-2760
pISSN - 0895-2477
DOI - 10.1002/mop.22014
Subject(s) - coplanar waveguide , microelectromechanical systems , parasitic extraction , transmission line , capacitor , microwave , realization (probability) , electronic engineering , phase shift module , electric power transmission , engineering , electrical engineering , circuit design , computer science , materials science , optoelectronics , voltage , telecommunications , statistics , mathematics
We present an integrated composite right/left handed transmission line (CRLH‐TL) phase shifter analogically controlled by means of a MEMS series capacitor. The device is based on coplanar waveguide (CPW) technology and operates at a central frequency of 18 GHz. An accurate and physical circuit model including parasitics inherent to this MEMS realization is presented. We describe the method used to design the presented structure, which consists in a mixed approach using the developed circuit model and full‐wave simulations. The MEMS‐controlled CRLH‐TL has been fabricated and characterized, showing good agreement with predicted performances. © 2006 Wiley Periodicals, Inc. Microwave Opt Technol Lett 48: 2496–2499, 2006; Published online in Wiley InterScience (www.interscience.wiley.com). DOI 10.1002/mop.22014