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Antenna‐coupled microbolometers on a silicon‐nitride membrane
Author(s) -
González F. J.,
Ilic B.,
Boreman G. D.
Publication year - 2005
Publication title -
microwave and optical technology letters
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.304
H-Index - 76
eISSN - 1098-2760
pISSN - 0895-2477
DOI - 10.1002/mop.21226
Subject(s) - silicon nitride , fabrication , materials science , vanadium oxide , microwave , spiral antenna , nitride , optoelectronics , oxide , detector , membrane , silicon , electrical engineering , antenna (radio) , nanotechnology , engineering , microstrip antenna , chemistry , telecommunications , layer (electronics) , metallurgy , medicine , alternative medicine , coaxial antenna , pathology , biochemistry
Square‐spiral antenna‐coupled microbolometers made of gold and chrome are fabricated on a silicon‐nitride membrane. The membrane gives mechanical stability and thermal isolation to the detectors so that they can be used as picture elements in commercial infrared‐imaging systems. The fabricated devices are measured under room pressure and under vacuum, giving D * values of 3 × 10 6 cm $\sqrt{Hz}$ /W and 1.7 × 10 7 cm $\sqrt{Hz}$ /W, respectively. By using vanadium‐oxide, values well above 1 × 10 8 cm $\sqrt{Hz}$ /W for D * can be obtained. Variations to the fabrication process that will allow the use of vanadium oxide are suggested. © 2005 Wiley Periodicals, Inc. Microwave Opt Technol Lett 47: 246–248, 2005; Published online in Wiley InterScience (www.interscience.wiley.com). DOI 10.1002/mop.21226