Premium
A comparison of shielded and conventional on‐wafer test‐fixture forward coupling on silicon‐on‐insulator (SOI) substrate
Author(s) -
Kaija Tero,
Ristolainen Eero O.
Publication year - 2005
Publication title -
microwave and optical technology letters
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.304
H-Index - 76
eISSN - 1098-2760
pISSN - 0895-2477
DOI - 10.1002/mop.20727
Subject(s) - silicon on insulator , shielded cable , wafer , fixture , test fixture , microwave , substrate (aquarium) , coupling (piping) , materials science , electronic engineering , optoelectronics , electrical engineering , engineering , silicon , mechanical engineering , telecommunications , oceanography , geology
In this paper, ground‐shielded and conventional on‐wafer test‐fixture properties on a silicon‐on‐insulator (SOI) substrate are studied in microwave measurements. The ground‐shielded fixture exhibits over 60% lower forward‐coupling than the corresponding conventional fixture. Reduced forward‐coupling improves the test‐fixture scalability. Shielded in‐fixtures provide the correct parasitics needed for successful de‐embedding. This is validated by measurements. © 2005 Wiley Periodicals, Inc. Microwave Opt Technol Lett 45: 70–75, 2005; Published online in Wiley InterScience (www.interscience.wiley.com). DOI 10.1002/mop.20727