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A feasibility study of ZnO‐based FBAR devices for an ultra‐mass‐sensitive sensor application
Author(s) -
Mai Linh,
Kim DongHyun,
Yim Munhyuk,
Yoon Giwan
Publication year - 2004
Publication title -
microwave and optical technology letters
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.304
H-Index - 76
eISSN - 1098-2760
pISSN - 0895-2477
DOI - 10.1002/mop.20351
Subject(s) - microwave , materials science , optoelectronics , quartz crystal microbalance , sensitivity (control systems) , resonance (particle physics) , analytical chemistry (journal) , electronic engineering , chemistry , engineering , telecommunications , physics , atomic physics , chromatography , organic chemistry , adsorption
We present a feasibility study of ZnO‐based FBAR devices and their fabrications for the ultra‐mass‐sensitive sensor application. In this work, a considerable shift in the resonance frequency is observed due to the mass‐loading effect by a mixture of ink and volatile methanol. A high sensitivity of 0.05 × 10 5 Hz · cm 2 /ng is obtained in the FBAR‐based device, which is ∼5 orders of magnitude higher than that of 0.057 Hz · cm 2 /ng reported in the conventional 5‐MHz quartz crystal microbalance. This approach seems useful for the ultra‐high‐mass resolution chemical sensor or biosensor applications. © 2004 Wiley Periodicals, Inc. Microwave Opt Technol Lett 42: 505–507, 2004; Published online in Wiley InterScience (www.interscience.wiley.com). DOI 10.1002/mop.20351