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A new three‐dimensional 30 GHz bandpass filter using the LIGA micromachined process
Author(s) -
Park KyoungYoul,
Lee JongChul,
Kim JongHeon,
Lee Byungje,
Kim NamYoung,
Park JaeYoung,
Kim GeunHo,
Bu JongUk,
Chung KiWoong
Publication year - 2001
Publication title -
microwave and optical technology letters
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.304
H-Index - 76
eISSN - 1098-2760
pISSN - 0895-2477
DOI - 10.1002/mop.1264
Subject(s) - band pass filter , liga , filter (signal processing) , microwave , insertion loss , electronic filter topology , voltage controlled filter , electronic engineering , materials science , engineering , electrical engineering , prototype filter , filter design , telecommunications , fabrication , medicine , alternative medicine , pathology
In this letter, a new micromachined 3‐D bandpass filter in the Ka‐band is proposed using the LIGA process. The characteristic impedance and design parameters for the 3‐D filter are determined from the experimental results and the filter design rule. The filter shows a wide‐bandpass characteristic of 39%, with an insertion loss of 1.7 dB at 33.2 GHz, and can be applicable in high‐power MMICs. © 2001 John Wiley & Sons, Inc. Microwave Opt Technol Lett 30: 199–201, 2001.