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Fabry–Perot microcavity pressure sensor with a novel single deeply corrugated diaphragm
Author(s) -
Wang W. J.,
Lin R. M.,
Ren Y.,
Sun T. T.,
Guo D. G.
Publication year - 2003
Publication title -
microwave and optical technology letters
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.304
H-Index - 76
eISSN - 1098-2760
pISSN - 0895-2477
DOI - 10.1002/mop.11180
Subject(s) - flatness (cosmology) , diaphragm (acoustics) , materials science , microwave , finite element method , pressure sensor , optoelectronics , surface micromachining , chip , fabry–pérot interferometer , optics , acoustics , engineering , electrical engineering , physics , structural engineering , fabrication , telecommunications , mechanical engineering , vibration , medicine , wavelength , alternative medicine , cosmology , pathology , quantum mechanics
A new Fabry–Perot (FP) microcavity structure with a novel single deeply corrugated diaphragm (SDCD) is presented for use in pressure sensing. Both analytical expression and finite‐element model (FEM) are used to evaluate the device's performance. The FP microcavity is fabricated on a single chip using both surface and bulk micromachining techniques. The results show that the signal averaging effect can substantially be reduced for the FP microcavity pressure sensor by the flatness‐enhancing diaphragm structure. © 2003 Wiley Periodicals, Inc. Microwave Opt Technol Lett 39: 240–243, 2003; Published online in Wiley InterScience (www.interscience.wiley.com). DOI 10.1002/mop.11180