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Dynamic behavior of MEM‐mirrors for tunable vertical cavity surface‐emitting lasers
Author(s) -
Guan Yan,
Matin M. A.
Publication year - 2003
Publication title -
microwave and optical technology letters
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.304
H-Index - 76
eISSN - 1098-2760
pISSN - 0895-2477
DOI - 10.1002/mop.11170
Subject(s) - laser , optoelectronics , materials science , microwave , wavelength , optics , microelectromechanical systems , tunable laser , computer science , physics , telecommunications
Tunable vertical cavity surface‐emitting lasers (VCSELs) are potentially useful for future optical networks. To date, the most successful mechanics to realize wavelength tunability in tunable VCSELs resides in MEM‐VCSELs via microelectromechanical (MEM) technology. The key parts to accomplish wavelength tuning in these MEM‐VCSELs are controllably movable top mirrors. We present dynamic problems in developing and characterizing these micromirrors. Simulation results of four different mirror shapes with different dimensions are presented. © 2003 Wiley Periodicals, Inc. Microwave Opt Technol Lett 39: 203–207, 2003; Published online in Wiley InterScience (www.interscience.wiley.com). DOI 10.1002/mop.11170