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Research on the dynamic performance of MEMS micromirrors
Author(s) -
Enguang Dai,
Matin M. A.,
Guan Yan
Publication year - 2002
Publication title -
microwave and optical technology letters
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.304
H-Index - 76
eISSN - 1098-2760
pISSN - 0895-2477
DOI - 10.1002/mop.10531
Subject(s) - microelectromechanical systems , microwave , modal , electronic engineering , engineering , materials science , computer science , optoelectronics , telecommunications , polymer chemistry
This paper presents a series of dynamic problems in developing and characterizing micromirror. A new application of MEMS micromirror‐based fast tunable VCSEL in wavelength routing switching has been proposed. The micromirror dynamic design aspects such as working modal selection, modal sequence shift, dynamic deformation, and electrical parameter fluctuation have been studied. © 2002 Wiley Periodicals, Inc. Microwave Opt Technol Lett 35: 111–113, 2002; Published online in Wiley InterScience (www.interscience.wiley.com). DOI 10.1002/mop.10531