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Analysis of current‐crowding effects in RF‐MEMS spiral inductors by simple equivalent circuits
Author(s) -
Yaojiang Zhang,
Haibo Long,
Zhenghe Feng
Publication year - 2002
Publication title -
microwave and optical technology letters
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.304
H-Index - 76
eISSN - 1098-2760
pISSN - 0895-2477
DOI - 10.1002/mop.10280
Subject(s) - current crowding , inductor , spiral (railway) , microwave , microelectromechanical systems , electronic circuit , electrical engineering , current (fluid) , equivalent circuit , skin effect , engineering , coupling (piping) , electronic engineering , topology (electrical circuits) , physics , optoelectronics , voltage , mechanical engineering , telecommunications
The metal loss of multiturn spiral inductors is known to increase dramatically under current‐crowding effects at high frequencies. An equivalent circuit is derived to simulate this current crowding, including skin and proximity effects. An efficient formula is derived to calculate self‐ and mutual coupling of currents in irregular hexahedrons. Possible approaches for the design of high‐Q RF‐MEMS spiral inductors are discussed. © 2002 Wiley Periodicals, Inc. Microwave Opt Technol Lett 33: 218–221, 2002; Published online in Wiley InterScience (www.interscience.wiley.com). DOI 10.1002/mop.10280