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Investigation on temperature stability of MEMS silicon‐based sixth‐order stripline filter
Author(s) -
Xiao Shaohui,
Huai Yongjin,
Ou Wen,
Liu Jingjie,
Ou Yi
Publication year - 2021
Publication title -
international journal of rf and microwave computer‐aided engineering
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.335
H-Index - 39
eISSN - 1099-047X
pISSN - 1096-4290
DOI - 10.1002/mmce.22836
Subject(s) - ripple , insertion loss , center frequency , bandwidth (computing) , passband , materials science , stopband , stripline , microelectromechanical systems , band pass filter , silicon , filter (signal processing) , electronic engineering , optoelectronics , electrical engineering , engineering , telecommunications , resonator , voltage
A double‐layer silicon‐based stripline filter with a center frequency of 20.76 GHz and a bandwidth of 2 GHz was designed by using an aggressive space mapping (ASM) and fabricated with microelectromechanical systems (MEMS) technology. The measurements agreed well with simulation, showing efficiency and accuracy of the ASM algorithm. Over temperature range of −50 to 80°C, the filter's performance such as insertion loss, bandwidth and central frequency were investigated and discussed, and the measured frequency drift is −55.5 ppm/°C and the bandwidth variation is ±4% over temperature range of −50 to 80°C. At 150°C after 1000 h of aging test, although the insertion loss of the filter slightly increased from 2.18 to 2.4 dB and the passband ripple deteriorated, the stopband rejection performance improved.