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A general procedure for the design of bulk acoustic wave filters
Author(s) -
Catherinot Lise,
Giraud Sylvain,
Chatras Matthieu,
Bila Stéphane,
Cros Dominique,
Baron Thomas,
Ballandras Sylvain,
Estagerie Laetitia,
Monfraix Philippe
Publication year - 2011
Publication title -
international journal of rf and microwave computer‐aided engineering
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.335
H-Index - 39
eISSN - 1099-047X
pISSN - 1096-4290
DOI - 10.1002/mmce.20550
Subject(s) - acoustics , resonator , lithium niobate , microwave , electronic filter , filter (signal processing) , piezoelectricity , materials science , computer science , physics , engineering , electrical engineering , optoelectronics , telecommunications , voltage
This article presents a procedure for the design of bulk acoustic wave (BAW) filters. The procedure consists of optimizing the modified Butterworth‐Van Dyke model of each resonator, considering appropriate technological parameters. The approach is demonstrated first to design a classical aluminum nitride‐based BAW filter but remains valid for other piezoelectric layers, considering either longitudinal or transverse acoustic wave coupling. The approach is finally applied to the design of a lithium niobate (LiNbO 3 ) BAW filter for wide‐band filtering applications. © 2011 Wiley Periodicals, Inc. Int J RF and Microwave CAE, 2011.