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MEMS capacitive series switch fabricated using PCB technology
Author(s) -
Ramadoss Ramesh,
Lee Simone,
Lee Y. C.,
Bright Victor M.,
Gupta K. C.
Publication year - 2007
Publication title -
international journal of rf and microwave computer‐aided engineering
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.335
H-Index - 39
eISSN - 1099-047X
pISSN - 1096-4290
DOI - 10.1002/mmce.20235
Subject(s) - capacitive sensing , insertion loss , microelectromechanical systems , microwave , materials science , electrical engineering , series (stratigraphy) , coplanar waveguide , fabrication , optoelectronics , rf switch , radio frequency , capacitor , electronic engineering , engineering , telecommunications , voltage , medicine , paleontology , alternative medicine , pathology , biology
In this article, an RF MEMS capacitive series switch fabricated using printed circuit processing techniques is discussed. Design, modeling, fabrication, and characterization of the CPW series switch are presented. An example CPW series capacitive switch with insertion loss less than 0.5 dB in the frequency range of 13–18 GHz and isolation better than 10 dB up to 18 GHz is discussed. The switch provides a minimum insertion loss of about 0.1 dB at the self‐resonance frequency of 16 GHz and a maximum isolation of about 42 dB at 1 GHz. © 2007 Wiley Periodicals, Inc. Int J RF and Microwave CAE, 2007.