Premium
Modeling of nonlinear micromechanical resonators and their simulation with the harmonic‐balance method
Author(s) -
Veijola Timo,
Mattila Tomi
Publication year - 2001
Publication title -
international journal of rf and microwave computer‐aided engineering
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.335
H-Index - 39
eISSN - 1099-047X
pISSN - 1096-4290
DOI - 10.1002/mmce.1039
Subject(s) - harmonic balance , resonator , nonlinear system , capacitive sensing , acoustics , signal (programming language) , harmonic , microwave , physics , materials science , electronic engineering , engineering , mechanics , mechanical engineering , electrical engineering , computer science , telecommunications , quantum mechanics , programming language
A model for a micromachined electrostatically driven high‐Q beam resonator is constructed of nonlinear voltage‐controlled current and charge sources. Its characteristics are simulated with the harmonic‐balance method in the RF simulation program APLAC demonstrating both the spring softening and hardening effects in the capacitive transducer and in the nonlinear mass‐spring systems. Measured large‐signal frequency‐domain transfer characteristics of a test resonator structure at various signal levels were accurately reproduced by model simulations. © 2001 John Wiley & Sons, Inc. Int J RF and Microwave CAE 11: 310–321, 2001.