Premium
A micromachined RF low phase noise voltage‐controlled oscillator for wireless communications
Author(s) -
Young Darrin J.,
Boser Bernhard E.,
Malba Vincent,
Bernhardt Anthony F.
Publication year - 2001
Publication title -
international journal of rf and microwave computer‐aided engineering
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.335
H-Index - 39
eISSN - 1099-047X
pISSN - 1096-4290
DOI - 10.1002/mmce.1037
Subject(s) - voltage controlled oscillator , phase noise , variable capacitor , inductor , electrical engineering , capacitor , materials science , inductance , microwave , varicap , capacitance , radio frequency , voltage , optoelectronics , electronic engineering , engineering , telecommunications , physics , electrode , quantum mechanics
An RF low phase noise voltage‐controlled oscillator is implemented with micromachined IC‐compatible variable capacitors and three‐dimensional coil inductor. Unlike conventional on‐chip passive devices, the micromachined variable capacitors achieve a high‐ Q value above 60 at 1 GHz with a 15% tuning range for a nominal 2 pF capacitance with 3 V tuning voltage. Three‐dimensional inductors minimize the substrate loss and achieve a Q of 30 at 1 GHz with a 4.8 nH inductance. Both passive components are fabricated on silicon substrates and thus amenable to monolithic integration with standard IC process. The prototype VCO exhibits −136 dBc/Hz phase noise at 3 MHz offset frequency from the carrier, suitable for most wireless communication applications, in particular GSM. The VCO is tunable from 855 Mhz to 863 MHz, limited by the test set‐up. © 2001 John Wiley & Sons, Inc. Int J RF and Microwave CAE 11: 285–300, 2001.