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A micromachined RF low phase noise voltage‐controlled oscillator for wireless communications
Author(s) -
Young Darrin J.,
Boser Bernhard E.,
Malba Vincent,
Bernhardt Anthony F.
Publication year - 2001
Publication title -
international journal of rf and microwave computer‐aided engineering
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.335
H-Index - 39
eISSN - 1099-047X
pISSN - 1096-4290
DOI - 10.1002/mmce.1037
Subject(s) - voltage controlled oscillator , phase noise , variable capacitor , inductor , electrical engineering , capacitor , materials science , inductance , microwave , varicap , capacitance , radio frequency , voltage , optoelectronics , electronic engineering , engineering , telecommunications , physics , electrode , quantum mechanics
Abstract An RF low phase noise voltage‐controlled oscillator is implemented with micromachined IC‐compatible variable capacitors and three‐dimensional coil inductor. Unlike conventional on‐chip passive devices, the micromachined variable capacitors achieve a high‐ Q value above 60 at 1 GHz with a 15% tuning range for a nominal 2 pF capacitance with 3 V tuning voltage. Three‐dimensional inductors minimize the substrate loss and achieve a Q of 30 at 1 GHz with a 4.8 nH inductance. Both passive components are fabricated on silicon substrates and thus amenable to monolithic integration with standard IC process. The prototype VCO exhibits −136 dBc/Hz phase noise at 3 MHz offset frequency from the carrier, suitable for most wireless communication applications, in particular GSM. The VCO is tunable from 855 Mhz to 863 MHz, limited by the test set‐up. © 2001 John Wiley & Sons, Inc. Int J RF and Microwave CAE 11: 285–300, 2001.