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Distributed MEMS transmission lines for tunable filter applications
Author(s) -
Liu Yu,
Borgioli Andrea,
Nagra Amit S.,
York Robert A.
Publication year - 2001
Publication title -
international journal of rf and microwave computer‐aided engineering
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.335
H-Index - 39
eISSN - 1099-047X
pISSN - 1096-4290
DOI - 10.1002/mmce.1034
Subject(s) - microelectromechanical systems , microwave , capacitor , resonator , coplanar waveguide , transmission line , band pass filter , materials science , variable capacitor , fabrication , insertion loss , electric power transmission , electronic engineering , electrical engineering , optoelectronics , electronic circuit , voltage , engineering , telecommunications , medicine , alternative medicine , pathology
This paper describes the design and fabrication of a distributed MEMS transmission line (DMTL), used to realize a transmission‐line with a voltage‐variable electrical length for microwave circuits. The DMTL is a coplanar waveguide periodically loaded with continuously‐variable MEMS capacitors. A tunable bandpass filter was designed and fabricated on 700 μm thick glass substrates using three capacitively coupled DMTL sections as variable shunt resonators. The measured results demonstrate a 3.8% tuning range at 20 GHz with 3.6 dB minimum insertion loss. Issues for future improvement are discussed. © 2001 John Wiley & Sons, Inc. Int J RF and Microwave CAE 11: 254–260, 2001.
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