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Model description and parameter extraction of on‐chip spiral inductors for MMICs
Author(s) -
Yin W. Y.,
Pan S. J.,
Li L. W.,
Gan Y. B.
Publication year - 2004
Publication title -
international journal of rf and microwave computer‐aided engineering
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.335
H-Index - 39
eISSN - 1099-047X
pISSN - 1096-4290
DOI - 10.1002/mmce.10123
Subject(s) - inductor , inductance , parametric statistics , electronic engineering , figure of merit , microwave , q factor , monolithic microwave integrated circuit , chip , electrical engineering , engineering , physics , optoelectronics , mathematics , telecommunications , cmos , resonator , amplifier , voltage , statistics
A statistical description of the global performance of on‐chip spiral inductors, based on extensive measurement is presented. These inductors were fabricated with different turn numbers or track lengths/track widths, but with the same spacing. From the S parameters measured using a de‐embedding technique, the inductance L , Q factor, self‐resonance frequency, and figure‐of‐merit indicator (FMI) of these inductors are determined. Various local scalable formulas are obtained in order to describe the features of these inductors. Based on extensive parametric studies, certain ways to improve these inductor performances can be found. © 2004 Wiley Periodicals, Inc. Int J RF and Microwave CAE 14, 111–121, 2004.