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MEMS variable‐capacitor phase shifters part I: Loaded‐line phase shifter
Author(s) -
Zhang Huantong,
Laws Alexander,
Gupta K. C.,
Lee Y. C.,
Bright Victor M.
Publication year - 2003
Publication title -
international journal of rf and microwave computer‐aided engineering
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.335
H-Index - 39
eISSN - 1099-047X
pISSN - 1096-4290
DOI - 10.1002/mmce.10089
Subject(s) - phase shift module , capacitor , variable capacitor , capacitance , microelectromechanical systems , microwave , phase (matter) , materials science , electronic engineering , electrical engineering , engineering , optoelectronics , voltage , physics , telecommunications , quantum mechanics , electrode
This article describes the design and characterization of a continuously variable loaded‐line phase shifter using micro‐electro‐mechanical system (MEMS) variable capacitors as phase shifting components. The design and characterization of micro‐electro‐mechanical system (MEMS) variable capacitors for operation at 26.5 GHz is described. A lumped‐element model is obtained from measurements and physical consideration. Experimental results show a capacitance‐tuning ratio of 3.7:1. The capacitor's characterization results are used for designing the phase shifter. A phase shift of 40.5° at 26.5 GHz for a loaded‐line type has been measured. There is good agreement between simulated and measured results. A companion article (Part II) describes the application of these variable capacitors to the design of reflection‐type phase shifters. © 2003 Wiley Periodicals, Inc. Int J RF and Microwave CAE 13: 321–337, 2003.