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Laser polishing and laser form correction of fused silica optics
Author(s) -
Heidrich S.,
Willenborg E.,
Weingarten C.,
Temmler A.
Publication year - 2015
Publication title -
materialwissenschaft und werkstofftechnik
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.285
H-Index - 38
eISSN - 1521-4052
pISSN - 0933-5137
DOI - 10.1002/mawe.201500319
Subject(s) - polishing , laser , optics , surface roughness , optical glass , materials science , surface finish , process (computing) , composite material , computer science , physics , operating system
With laser polishing, the roughness of ground glass surfaces can be significantly reduced. With process speeds up to 1 cm 2 /s independent of the processed surface shape, the resulting roughness is already sufficient for illumination optics. To further reduce the roughness, the polishing process itself will be optimized and moreover combined with a subsequent laser based form correction. Within this paper, results of laser polishing as well as laser form correction and combination of the two processes are presented and discussed.