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Zugversuch an dünnen Blei‐Zirkonat‐Titanat (PZT)/Platin (Pt) Schichten
Author(s) -
Park J.H.,
Bae H.Y.,
Oh Y.R.,
Kim Y.J.,
Kim H.Y.,
Huh Y.H.
Publication year - 2011
Publication title -
materialwissenschaft und werkstofftechnik
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.285
H-Index - 38
eISSN - 1521-4052
pISSN - 0933-5137
DOI - 10.1002/mawe.201100810
Subject(s) - materials science , lead zirconate titanate , ultimate tensile strength , composite material , elastic modulus , thin film , tensile testing , lead titanate , young's modulus , ferroelectricity , dielectric , optoelectronics , nanotechnology
This paper presents the results of tensile tests for lead zirconate titanate (PZT)/Platinum (Pt) thin films of 2.15 μm thickness in atmospheric air at room temperature. An axial loading tester developed by the authors was used for the tests. The tester was equipped with a load cell with a maximum capacity of 0.5 N and a non‐contact position measuring system based on the principle of capacitance micrometry. Furthermore, the tester was equipped with a CCD (charge‐coupled device) system for measuring the displacement of the gage length. Specimens with three different widths (50, 100 and 150 μm) were fabricated to study the size (width of specimen) effects. The elastic moduli of the specimens with 50, 100 and 150 μm width were 72.8 ± 3.7, 75.0 ± 1.3, 73.3 ± 1.8 GPa, respectively. In addition, the ultimate tensile strength of the specimens with 50, 100 and 150 μm width were 263.4 ± 21.1, 238.6 ± 4.5, 221.1 ± 13.9 MPa, respectively. It was observed that the width of specimen has little effect on the elastic modulus of PZT/Pt thin films but has an effect on the ultimate tensile strength of PZT/Pt thin films and the ultimate tensile strength decreases as the width increases. It was assumed that the scatter in the ultimate tensile strength of 50 μm width was attributed to delamination of PZT/Pt layers before the fracture in the tensile test. The 0.2% offset yield strength could not be measured because the PZT/Pt thin film is very brittle.