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The columnar growth angle in obliquely evaporated Thin films
Author(s) -
Krug J.
Publication year - 1995
Publication title -
materialwissenschaft und werkstofftechnik
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.285
H-Index - 38
eISSN - 1521-4052
pISSN - 0933-5137
DOI - 10.1002/mawe.19950260107
Subject(s) - thin film , substrate (aquarium) , materials science , incidence (geometry) , microstructure , optics , angle of incidence (optics) , oblique case , chemical vapor deposition , deposition (geology) , composite material , condensed matter physics , physics , nanotechnology , geology , oceanography , paleontology , linguistics , philosophy , sediment
Vapor‐deposited thin films grown under conditions of oblique incidence commonly develop a microstructure of columns, inclined at an angle β relative to the substrate normal, which differs from the angle of incidence α. Here it is shown that the functional relation β(α) is universally linked to the dependence of the film density ρ on the angle of incidence, through the equation tan β=tan α + ρ −1 (dρ/dα). The theory is supported by an analysis of published numerical data obtained from simulations of ballistic deposition of disks and spheres.