Premium
Influence of Spray Solution Quantity on Microstructural and Optical Properties of In 2 O 3 Thin Films Prepared by Spray Pyrolysis
Author(s) -
Deokate Ramesh J.
Publication year - 2020
Publication title -
macromolecular symposia
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.257
H-Index - 76
eISSN - 1521-3900
pISSN - 1022-1360
DOI - 10.1002/masy.201900152
Subject(s) - materials science , thin film , band gap , lattice constant , transmittance , sheet resistance , grain size , figure of merit , spray pyrolysis , microstructure , analytical chemistry (journal) , composite material , diffraction , optics , optoelectronics , nanotechnology , chemistry , physics , layer (electronics) , chromatography
Highly textured indium oxide (In 2 O 3 ) thin films are produced by chemical spray pyrolysis method onto glass substrates. The impact of film thickness on the structural, morphological, and optoelectronic properties of In 2 O 3 thin films are investigated. The effect of film thickness on microstructural properties like grain size, lattice constants, dislocation density, and strain of the films are reported. X‐Ray diffraction study reveals that the thin films have a cubic structure with favored (222) plane. The morphological study shows the spherical and uninterrupted distribution of grains. The typical transmittance of the In 2 O 3 thin films, measured in the 300–1100 nm wavelength. The optical properties show that direct band gap value improved from 3.35–3.52 eV with film thickness. The best results are shown with 352 nm film thickness which has direct band gap of 3.49 eV, minimum sheet resistance of 80 Ω/□, lowest resistivity of 4 × 10 −3 Ω. cm, maximum carrier concentration 6.1 × 10 20 cm −3 , mobility 29.55 cm 2 V −1 s −1 and highest figure of merit is achieved (12.110 −2 □/Ω). The results exhibited the 60 mL spray solution quantity of In 2 O 3 films is suitable for device application.