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Dynamics of uv excimer laser ablation of pmma, caused by mechanical stresses theory and experiment
Author(s) -
Kitai M. S.,
Popkov V. L.,
Semchishen V. A.
Publication year - 1990
Publication title -
makromolekulare chemie. macromolecular symposia
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.257
H-Index - 76
eISSN - 1521-3900
pISSN - 0258-0322
DOI - 10.1002/masy.19900370122
Subject(s) - ablation , materials science , excimer , photochemistry , laser , irradiation , laser ablation , absorption (acoustics) , polymer , excimer laser , radiation , composite material , optics , chemistry , physics , nuclear physics , engineering , aerospace engineering
A quantitative model of PMMA ablation was developed. Photochemical reactions, heating of the polymer and mechanical stresses were taken into consideration. The increasing of the optical absorption during the photochemical reaction caused by ArF laser radiation was investigated. The developed model allowed to evaluate the ablation parameters.