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Fabrication of microstructures with extreme structural heights by reaction injection molding
Author(s) -
Hagmann P.,
Ehrfeld W.,
Vollmer H.
Publication year - 1989
Publication title -
makromolekulare chemie. macromolecular symposia
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.257
H-Index - 76
eISSN - 1521-3900
pISSN - 0258-0322
DOI - 10.1002/masy.19890240125
Subject(s) - liga , materials science , electroforming , microstructure , fabrication , molding (decorative) , microelectronics , mold , composite material , lithography , surface roughness , surface finish , nanotechnology , optoelectronics , medicine , alternative medicine , pathology , layer (electronics)
For fabrication of microstructures with extreme structural heights a reaction injection micromolding process has been developed. It uses mold inserts produced by deep‐etch X‐ray lithography and electroforming which have superior surface quality with a surface roughness R max of less than 0.02 μm. For methyl methacrylate base casting resins in combination with an internal mold release agent the molding conditions have been optimized on a laboratory‐scale reaction injection molding machine and correlated with thermomechanical measurements. It has been demonstrated by many experiments that in spite of minimum lateral dimensions of only some micrometers and structural heights of some hundred micrometers a yield of approximately 100 % can be obtained in the micromolding process. This new process may be applied for producing innovative microstructure products, e.g. in the fields of sensors, packaging and interconnection in microelectronics, filtration, microoptics and synthetic fibers.