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Macromol. Rapid Commun. 3/2016
Author(s) -
Fimberger Martin,
Behrendt Andreas,
Jakopic Georg,
Stelzer Franz,
Kumbaraci Volkan,
Wiesbrock Frank
Publication year - 2016
Publication title -
macromolecular rapid communications
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 1.348
H-Index - 154
eISSN - 1521-3927
pISSN - 1022-1336
DOI - 10.1002/marc.201670013
Subject(s) - photoresist , chromophore , oxazoline , ene reaction , materials science , cycloaddition , substrate (aquarium) , polymer chemistry , anti reflective coating , nanotechnology , chemistry , photochemistry , organic chemistry , catalysis , oceanography , layer (electronics) , geology
Frontispiece: Bottom antireflective coatings (BARCs) are cast between a substrate and a photoresist and are intended to minimize the intensity of reflected light waves. Hence, they are one key strategy for enhancing the resolution of photoresists. Ene‐ and yne‐bearing copoly(2‐oxazoline)s can be functionalized with the chromophore anthracene (Huisgen cycloaddition involving the yne functions) and subsequently crosslinked (thiol‐ene reaction involving the ene functions). Such copoly(2‐oxazoline)‐based films decrease swing‐curves by 50%, indicative of a significantly enhanced resolution of the photoresists. Further details can be found in the article by M. Fimberger, A. Behrendt, G. Jakopic, F. Stelzer, V. Kumbaraci, and F. Wiesbrock* on page 233.