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Self‐Aligned Micropatterns of Bifunctional Polymer Surfaces with Independent Chemical and Topographical Contrast
Author(s) -
Baxamusa Salmaan H.,
Montero Laura,
Borrós Salvador,
Gleason Karen K.
Publication year - 2010
Publication title -
macromolecular rapid communications
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 1.348
H-Index - 154
eISSN - 1521-3927
pISSN - 1022-1336
DOI - 10.1002/marc.200900815
Subject(s) - bifunctional , polymer , lithography , materials science , photomask , nanotechnology , photolithography , layer (electronics) , micropatterning , lift (data mining) , composite material , optoelectronics , resist , chemistry , computer science , organic chemistry , data mining , catalysis
Bifunctional surfaces are micropatterned using a self‐aligned, dual‐purpose lithographic mask and pairs of conformally deposited iCVD polymers. A first layer is deposited, then physically masked and etched in oxygen plasma. A second layer is deposited with the mask still in place. Lift‐off reveals the micropatterned surface. The thicknesses of the two layers are independently controlled so that the resultant surface displays both chemical and topographical contrast. The patterning scheme is independent of the polymers used and order of deposition. We use this scheme to create surfaces that spatially confine microcondensation, as well as chemical functionality. We also demonstrate microwells whose depth can be altered in response to a water stimulus.