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Substrate‐Induced Controllable Wrinkling for Facile Nanofabrication
Author(s) -
Li Zhong,
Yang Dayong,
Liu Xing,
Ma Hongwei
Publication year - 2009
Publication title -
macromolecular rapid communications
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 1.348
H-Index - 154
eISSN - 1521-3927
pISSN - 1022-1336
DOI - 10.1002/marc.200900284
Subject(s) - materials science , bilayer , wrinkle , substrate (aquarium) , nanolithography , coating , adhesive , thin film , electrical conductor , composite material , porosity , nanotechnology , layer (electronics) , membrane , fabrication , chemistry , medicine , oceanography , alternative medicine , pathology , geology , biochemistry
Abstract In this work, we report a facile and effective strategy to generate patterned wrinkles. This strategy includes first adhering a thin poly(dimethylsiloxane) (PDMS) film (<82 µm) on porous conductive adhesive tape (CAT), followed by sputter coating of Au onto PDMS under vacuum condition, which results in formation of patterned wrinkles on the Au‐PDMS bilayer. CAT was found to induce local stretching of PDMS thin film, which was the key for controlled wrinkle formation. Compared with previous wrinkling methods, our strategy is simpler and gives smaller feature sizes (down to 300 nm).