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Combinatorial Pulsed Laser Deposition of Pentacene Films for Field Effect Devices
Author(s) -
Yamaguchi Jun,
Itaka Kenji,
Hayakawa Tomohiro,
Arai Keiichiro,
Yamashiro Mitsugu,
Yaginuma Seiichiro,
Koinuma Hideomi
Publication year - 2004
Publication title -
macromolecular rapid communications
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 1.348
H-Index - 154
eISSN - 1521-3927
pISSN - 1022-1336
DOI - 10.1002/marc.200300238
Subject(s) - pulsed laser deposition , pentacene , materials science , schematic , laser , deposition (geology) , optoelectronics , thin film , fluence , substrate (aquarium) , pulsed laser , optics , nanotechnology , thin film transistor , electronic engineering , physics , paleontology , layer (electronics) , sediment , geology , oceanography , engineering , biology
Summary: Combinatorial pulsed laser deposition (PLD) technique has been applied to the fabrication of pentacene thin films for field effect devices. The pentacene films were fabricated by PLD with the Nd:YAG laser wavelength, fluence and the substrate temperature as combinatorial parameters. From the IR and UV‐vis absorption spectra and electrical properties of the films, the laser wavelength and fluence have been elucidated to be factors dominating the properties of the film.Schematic diagram of a combinatorial pulsed laser deposition (PLD) system.