Premium
Transparent Electric Heaters Based on Photoresist‐Derived Carbon Micropatterns on Quartz Plates
Author(s) -
Lee ByoungMin,
Nam HuiGyun,
Choi Hyeong Yeol,
Hong SungKwon,
Jeong Young Gyu,
Choi JaeHak
Publication year - 2018
Publication title -
macromolecular materials and engineering
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.913
H-Index - 96
eISSN - 1439-2054
pISSN - 1438-7492
DOI - 10.1002/mame.201800296
Subject(s) - materials science , photoresist , transmittance , inert gas , electrical resistivity and conductivity , carbonization , carbon fibers , optoelectronics , composite material , lithography , composite number , scanning electron microscope , electrical engineering , layer (electronics) , engineering
Abstract In this study, transparent electric heaters (TEHs) are developed based on photoresist‐derived carbon micropatterns (CMs). Well‐defined SU‐8 micropatterns formed by deep UV lithography are carbonized in a tube furnace under an inert atmosphere. The resulting CMs are found to have pseudo‐graphitic structures containing both graphitic and disordered structures. The optical transmittance and electrical conductivity of the CMs increase as their thickness increases. The 102 nm thick CMs exhibit a good transmittance of 78% at 550 nm and a high electrical conductivity of 2.51 × 10 2 S cm −1 . As TEHs, the 102 nm thick CMs demonstrate a maximum temperature of 116 °C with a maximum heating rate of 8.78 °C s −1 at an applied voltage of 60 V and a low electricity consumption of 1.02 W cm −2 , which are comparable to the electric heating performance of TEHs prepared with carbon nanomaterials. Therefore, the CMs fabricated in this study can be utilized as electrodes for TEHs in various medical, industrial, consumer, and automobile applications.