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Copolymers from tert ‐Butyl Methacrylate with Trimethylsilyl Methacrylate or Methacrylic Acid: Models for Resist Polymers
Author(s) -
Ferbitz Jens,
Mormann Werner
Publication year - 2003
Publication title -
macromolecular chemistry and physics
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.57
H-Index - 112
eISSN - 1521-3935
pISSN - 1022-1352
DOI - 10.1002/macp.200390024
Subject(s) - methacrylic acid , methacrylate , polymer chemistry , copolymer , trimethylsilyl , methyl methacrylate , chemistry , materials science , polymer , organic chemistry
Free radical copolymerisation of tert ‐butyl methacrylate ( 1 ) with trimethylsilyl methacrylate ( 2 ) and methacrylic acid ( 3 ) has been investigated. Reactivity ratios for methacrylic acid and tert ‐butyl methacrylate indicate an azeotropic copolymerisation (r 1 = 0.476 ± 0.103; r 3 = 0.300 ± 0.032), whereas the two esters show preferential incorporation of 2 (r 1 = 0.170 ± 0.050; r 2 = 1.170 ± 0.124). Thermal cis ‐elimination of isobutylene from the tert ‐butyl ester and subsequent formation of six‐membered cyclic anhydride moieties has been studied. For poly(methacrylic acid‐ co ‐ tert‐ butyl methacrylate) thermogravimetry could be used to determine copolymer composition. Solvolytic desilylation of the trimethylsilyl ester groups has been investigated as an alternative route to poly(methacrylic acid‐ co ‐ tert ‐butyl methacrylate). The tert ‐butyl ester is not affected under the conditions of desilylation. Sequence distribution of both copolymers has been calculated using the method introduced by Bruns and Motoc.Copolymer composition diagram for tert ‐butyl methacrylate/methacrylic acid.