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Oxidationsbeständigkeit von Ti 0,5 Al 0,5 N‐Beschichtungen
Author(s) -
Münz W.D.
Publication year - 1990
Publication title -
materials and corrosion
Language(s) - Uncategorized
Resource type - Journals
SCImago Journal Rank - 0.487
H-Index - 55
eISSN - 1521-4176
pISSN - 0947-5117
DOI - 10.1002/maco.19900411220
Subject(s) - sputter deposition , cavity magnetron , sputtering , materials science , wear resistance , metallurgy , physics , thin film , nanotechnology