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High‐Speed Modulator Based on Electro‐Optic Polymer Infiltrated Subwavelength Grating Waveguide Ring Resonator
Author(s) -
Pan Zeyu,
Xu Xiaochuan,
Chung ChiJui,
Dalir Hamed,
Yan Hai,
Chen Ke,
Wang Yaguo,
Jia Baohua,
Chen Ray T.
Publication year - 2018
Publication title -
laser and photonics reviews
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 3.778
H-Index - 116
eISSN - 1863-8899
pISSN - 1863-8880
DOI - 10.1002/lpor.201700300
Subject(s) - materials science , resonator , grating , optical modulator , optics , silicon photonics , optoelectronics , silicon , bandwidth (computing) , waveguide , electro optic modulator , duty cycle , phase modulation , electrical engineering , telecommunications , physics , voltage , computer science , phase noise , engineering
Silicon‐organic hybrid integrated devices show great potential in high‐speed optical interconnects and sensors. In this paper, a high‐speed modulator based on an electro‐optic (EO) polymer (SEO125) infiltrated sub‐wavelength grating (SWG) waveguide ring resonator is presented. The core of the SWG waveguide consists of periodically arranged silicon pillars along the light propagation direction, which provides large mode volume overlap with EO polymer. The optimized SWG shows a mode volume overlap of 36.2% with a silicon duty cycle of 0.7. The 3‐dB modulation bandwidth of the fabricated modulator is measured to be larger than 40 GHz occupying an area of 70 μm x 29 μm, which is the largest bandwidth and the most compact footprint that has been demonstrated for ring resonators on the silicon‐organic hybrid platform.

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