Open AccessFemtosecond Laser Micro Milling Using Special Trepanning Optics
Author(s) -
Friedel Susanna,
Stolberg Klaus
Publication year - 2017
Publication title -
laser technik journal
Language(s) - English
Resource type - Journals
eISSN - 1863-9119
pISSN - 1613-7728
DOI - 10.1002/latj.201700010
Subject(s) - materials science , surface micromachining , laser , machining , femtosecond , isotropic etching , grinding , etching (microfabrication) , optics , optoelectronics , radius of curvature , curvature , melting point , ultrashort pulse , composite material , fabrication , metallurgy , medicine , mean curvature , alternative medicine , geometry , pathology , layer (electronics) , mean curvature flow , mathematics , physics
Micromachining methods like electrical discharge machining (micro‐EDM), chemical etching, mechanical micro milling or thermal laser machining, are limited by material properties like chemical reactivity, optical absorption, electrical conductivity, and melting point. Also, the demand for a wall steepness of 90°, a feature size of < 100 μm, radius of curvature < 20 μm, or the required process speed limit the choice of the appropriate technology. Here, the combination of ultrafast lasers with a special optical setup enables new solutions.