Premium
Active‐matrix mesh electronics thin‐film‐transistor arrays for biometrics‐under‐display and biomedical applications
Author(s) -
Kronemeijer Auke Jisk,
Peeters Bart,
Haas Gerard,
Verbeek Roy,
Bel Thijs,
Laar Robert,
Ugalde Lopez Leslye Astrid,
Peters Laurens C. J. M.,
Gelinck Gerwin H.
Publication year - 2021
Publication title -
journal of the society for information display
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.578
H-Index - 52
eISSN - 1938-3657
pISSN - 1071-0922
DOI - 10.1002/jsid.1025
Subject(s) - thin film transistor , active matrix , electronics , transistor , materials science , backplane , flexible electronics , computer science , scalability , process (computing) , nanotechnology , optoelectronics , computer hardware , electrical engineering , engineering , voltage , layer (electronics) , database , operating system
A monolithic manufacturing process is presented for the realization of active‐matrix meshed thin‐film‐transistor (TFT) arrays on foil with physical voids between pixels, realizing membrane‐like electronic arrays. The process is scalable to large‐area substrates and enables (improved performance of) biometrics‐under‐display applications. Moreover, membrane‐like TFT arrays provide opportunities for the use of TFT technology, and broader large‐area thin‐film electronics, in new applications in the domain of biomedical electronics, as demonstrated by example use cases of in vivo electrophysiology of the brain as well as in vitro electrophysiology in smart microwell plates.