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Extremely foldable LTPS TFT backplane using blue laser annealing for low‐cost manufacturing of rollable and foldable AMOLED display
Author(s) -
Lee Suhui,
Do Youngbin,
Kim Dongjin,
Jang Jin
Publication year - 2021
Publication title -
journal of the society for information display
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.578
H-Index - 52
eISSN - 1938-3657
pISSN - 1071-0922
DOI - 10.1002/jsid.1024
Subject(s) - amoled , backplane , thin film transistor , materials science , optoelectronics , transistor , flexible display , annealing (glass) , electrical engineering , voltage , computer science , computer hardware , nanotechnology , composite material , active matrix , engineering , layer (electronics)
Abstract The crystallization of a‐Si by blue laser annealing (BLA) is introduced for low‐cost, high‐resolution thin‐film transistor (TFT) backplanes for foldable and rollable AMOLED displays. A big advantage of BLA is to provide low‐temperature polycrystalline silicon (LTPS) with protrusion‐free active channel. The BLA LTPS TFT manufactured on flexible substrate exhibits high field‐effect mobility of 169 cm 2 /Vs, a smaller subthreshold voltage swing less than 201 mV/dec, and excellent electrical stability and mechanical robustness.