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Micro‐Raman characterization of laser‐induced local thermo‐oxidation of thin chromium films
Author(s) -
Baranov A. V.,
Bogdanov K. V.,
Fedorov A. V.,
Yarchuk M. V.,
Ivanov A. I.,
Veiko V. P.,
Berwick K.
Publication year - 2011
Publication title -
journal of raman spectroscopy
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.748
H-Index - 110
eISSN - 1097-4555
pISSN - 0377-0486
DOI - 10.1002/jrs.2920
Subject(s) - raman spectroscopy , chromium , oxide , materials science , layer (electronics) , characterization (materials science) , picosecond , analytical chemistry (journal) , thin film , laser , etching (microfabrication) , thermal oxidation , chemistry , optics , nanotechnology , metallurgy , physics , chromatography
Micro‐Raman spectroscopy was applied to the characterization of the chemical composition and topography of protective oxide layers formed under atmospheric conditions on the surface of thin chromium films. Strips of the layers were produced by local thermal heating using focused sub‐picosecond pulsed laser radiation. It is shown that a CrO 2 layer is initially formed on the chromium surface at low light exposures. Increasing the exposure results in the transformation of the CrO 2 layer to Cr 2 O 3 . The influence of the etching conditions on the composition and thickness of the oxide layers is investigated. The topography of the CrO 2 and Cr 2 O 3 oxide layers in transverse sections of the strips is demonstrated by the Raman mapping. Copyright © 2011 John Wiley & Sons, Ltd.