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Fourier transform Raman spectra of diamond‐like carbon films
Author(s) -
Durig J. R.,
Little T. S.,
Bist H. D.,
Rengen A.,
Narayan J.
Publication year - 1992
Publication title -
journal of raman spectroscopy
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.748
H-Index - 110
eISSN - 1097-4555
pISSN - 0377-0486
DOI - 10.1002/jrs.1250231109
Subject(s) - raman spectroscopy , materials science , diamond , wafer , analytical chemistry (journal) , silicon , substrate (aquarium) , fourier transform infrared spectroscopy , fourier transform spectroscopy , diamond like carbon , phonon , carbon fibers , fourier transform , spectral line , optics , thin film , optoelectronics , chemistry , nanotechnology , condensed matter physics , physics , composite material , oceanography , chromatography , quantum mechanics , astronomy , composite number , geology
Abstract Fourier transform (FT) Raman spectra (3500–50 cm −1 ) were recorded for hard diamond‐like carbon (DLC) films deposited on silicon wafer substrates at various temperatures. The observed frequency of the graphitic optic zone center phonon (G) at 1595 cm −1 was found to remain constant with variations in the deposition temperature of the substrate, the excitation wavelength and the laser power. However, the disorder activated optical zone edge phonon (D), observed in the 1380–1250 cm −1 region, exhibits changes in the band maximum frequency with the above‐mentioned variables. FT Raman spectroscopy, applied to these films, is shown to be a useful probe for the identification of various different types of diamond‐like structures which are present.