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Monte Carlo simulation of radio‐frequency plasmas in N 2
Author(s) -
Settaouti L.,
Settaouti A.
Publication year - 2011
Publication title -
international journal of numerical modelling: electronic networks, devices and fields
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.249
H-Index - 30
eISSN - 1099-1204
pISSN - 0894-3370
DOI - 10.1002/jnm.763
Subject(s) - radio frequency , electric field , monte carlo method , electron , ion , plasma , atomic physics , physics , amplitude , computational physics , electrode , optics , electrical engineering , nuclear physics , quantum mechanics , statistics , mathematics , engineering
The structure of radio‐frequency (rf) discharges in N 2 is examined for the electrons and positive ions, in which electron–neutral collisions and ion–neutral collisions are taken into consideration. Some detailed properties of rf plasmas sustained by an rf source voltage of 13.56 MHz and an amplitude of 200 V are presented using Monte Carlo simulation in electropositive gas (N 2 ). It is shown that most of the rf external electric field is absorbed in the sheath regions, whereas electrons respond easily to the oscillating rf electric field, ions cannot oscillate with the rf electric field. The oscillations of the electron cloud determine the instantaneous sheath thickness near each electrode. The mean energy and the density of charged particles are also discussed. Copyright © 2010 John Wiley & Sons, Ltd.