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Dynamic analysis of flexural vibration mode of an atomic force microscope cantilever with a sidewall probe in liquid
Author(s) -
Payam Amir F.,
Duy Vy Nguyen
Publication year - 2021
Publication title -
microscopy research and technique
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.536
H-Index - 118
eISSN - 1097-0029
pISSN - 1059-910X
DOI - 10.1002/jemt.23636
Subject(s) - cantilever , flexural strength , stiffness , materials science , vibration , resonance (particle physics) , non contact atomic force microscopy , atomic force microscopy , normal mode , optics , composite material , acoustics , conductive atomic force microscopy , nanotechnology , physics , atomic physics
In this paper, dynamic behavior and the resonance frequencies of flexural vibration modes of an atomic force microscope cantilever with sidewall probe immersed in liquid to surface stiffness variations have been investigated and a closed‐form expression is derived. Using numerical analysis, the flexural resonance frequencies of microcantilever immersed in liquid are calculated and the results are compared with the air environment. Then, the effect of sidewall length and normal stiffness on the frequency is investigated. Moreover, the surface‐coupled effect between the cantilever and simple surface when the cantilever is close to the surface is considered and its effect on the quality factors of the first to fourth modes is studied.