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Study of the sensitivity and resonant frequency of the torsional modes of an AFM cantilever with a sidewall probe based on a nonlocal elasticity theory
Author(s) -
Abbasi Mohammad,
Karami Mohammadi Ardeshir
Publication year - 2015
Publication title -
microscopy research and technique
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.536
H-Index - 118
eISSN - 1097-0029
pISSN - 1059-910X
DOI - 10.1002/jemt.22488
Subject(s) - cantilever , elasticity (physics) , stiffness , vibration , physics , equations of motion , boundary value problem , classical mechanics , normal mode , sensitivity (control systems) , timoshenko beam theory , mechanics , materials science , acoustics , composite material , thermodynamics , quantum mechanics , electronic engineering , engineering
A relationship based on a nonlocal elasticity theory is developed to investigate the torsional sensitivity and resonant frequency of an atomic force microscope (AFM) with assembled cantilever probe (ACP). This ACP comprises a horizontal cantilever and a vertical extension, and a tip located at the free end of the extension, which makes the AFM capable of topography at sidewalls of microstructures. First, the governing differential equations of motion and boundary conditions for dynamic analysis are obtained by a combination of the basic equations of nonlocal elasticity theory and Hamilton's principle. Afterward, a closed‐form expression for the sensitivity of vibration modes has been obtained using the relationship between the resonant frequency and contact stiffness of cantilever and sample. These analysis accounts for a better representation of the torsional behavior of an AFM with sidewall probe where the small‐scale effect are significant. The results of the proposed model are compared with those of classical beam theory. The results show that the sensitivities and resonant frequencies of ACP predicted by the nonlocal elasticity theory are smaller than those obtained by the classical beam theory. Microsc. Res. Tech. 78:408–415, 2015 . © 2015 Wiley Periodicals, Inc.