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In situ SEM indentation experiments: Instruments, methodology, and applications
Author(s) -
Ghisleni Rudy,
RzepiejewskaMalyska Karolina,
Philippe Laetitia,
Schwaller Patrick,
Michler Johann
Publication year - 2009
Publication title -
microscopy research and technique
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.536
H-Index - 118
eISSN - 1097-0029
pISSN - 1059-910X
DOI - 10.1002/jemt.20677
Subject(s) - indentation , scanning electron microscope , materials science , in situ , nanoindentation , microelectromechanical systems , nanoelectromechanical systems , nanotechnology , nanowire , composite material , chemistry , nanoparticle , nanomedicine , organic chemistry
The purpose of this article is to present the design and capabilities of two in situ scanning electron microscope (SEM) indentation instruments covering a large load range from μN to N. The capabilities and advantages of in situ SEM indentation are illustrated by two applications: indentation of a thin film and a nanowire. All the experiments were performed on electrodeposited cobalt, whose outstanding magnetic properties make it a candidate material for MEMS and NEMS devices. Microsc. Res. Tech., 2009. © 2009 Wiley‐Liss, Inc.