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Thickness measurements with electron energy loss spectroscopy
Author(s) -
Iakoubovskii K.,
Mitsuishi K.,
Nakayama Y.,
Furuya K.
Publication year - 2008
Publication title -
microscopy research and technique
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.536
H-Index - 118
eISSN - 1097-0029
pISSN - 1059-910X
DOI - 10.1002/jemt.20597
Subject(s) - electron energy loss spectroscopy , spectroscopy , mean free path , range (aeronautics) , inelastic mean free path , electron , excitation , scaling , atomic physics , lambda , calibration , electron scattering , chemistry , physics , scattering , molecular physics , optics , materials science , nuclear physics , mathematics , geometry , quantum mechanics , composite material
Measurements of thickness using electron energy loss spectroscopy (EELS) are revised. Absolute thickness values can be quickly and accurately determined with the Kramers‐Kronig sum method. The EELS data analysis is even much easier with the log‐ratio method, however, absolute calibration of this method requires knowledge of the mean free path of inelastic electron scattering λ. The latter has been measured here in a wide range of solids and a scaling law λ ∼ ρ −0.3 versus mass density ρ has been revealed. EELS measurements critically depend on the excitation and collection angles. This dependence has been studied experimentally and theoretically and an efficient model has been formulated. Microsc. Res. Tech., 2008. © 2008 Wiley‐Liss, Inc.