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Mixed lagrange time delay estimation autoregressive Wiener filter application for real‐time SEM image enhancement
Author(s) -
Sim K.S.,
Law K.K.,
Tso C.P.
Publication year - 2007
Publication title -
microscopy research and technique
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.536
H-Index - 118
eISSN - 1097-0029
pISSN - 1059-910X
DOI - 10.1002/jemt.20490
Subject(s) - wiener filter , filter (signal processing) , noise (video) , autoregressive model , image (mathematics) , image processing , computer science , computer vision , image noise , artificial intelligence , mathematics , algorithm , statistics
Abstract A new filter is developed for the enhancement of scanning electron microscope (SEM) images. A mixed Lagrange time delay estimation auto‐regression (MLTDEAR)‐based interpolator is used to provide an estimate of noise variance to a standard Wiener filter. A variety of images are captured and the performance of the filter is shown to surpass the conventional noise filters. As all the information required for processing is extracted from a single image, this method is not constrained by image registration requirements and thus can be applied in real‐time in cases where specimen drift is presented in the SEM image. Microsc. Res. Tech., 2007. © 2007 Wiley‐Liss, Inc.