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Nanoparticle scanning and detection on flat and structured surfaces using fluorescence microscopy
Author(s) -
Guldiken Rasim,
Makaram Prashanth,
Bakhtari Kaveh,
Park Jingoo,
Busnaina Ahmed A.
Publication year - 2007
Publication title -
microscopy research and technique
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.536
H-Index - 118
eISSN - 1097-0029
pISSN - 1059-910X
DOI - 10.1002/jemt.20477
Subject(s) - particle (ecology) , fluorescence , materials science , nanoparticle , nanoscopic scale , microscopy , nanotechnology , scanning electron microscope , fluorescence microscope , scanning probe microscopy , optics , physics , composite material , oceanography , geology
A new technique is proposed for the scanning and detection of nanoparticles on flat substrates and three‐dimensional structures using fluorescence microscopy. This technique is utilized for particle removal measurements especially in semiconductor and hard disk manufacturing. This fluorescent particle scanning technique enables nanoscale particle detection. The technique shows that single particles down to 63 nm could be detected and counted. The technique is also capable of detecting particles in trenches that are as deep as 500 μm. Microsc. Res. Tech., 2007. © 2007 Wiley‐Liss, Inc.