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New developments in electron energy loss spectroscopy
Author(s) -
Keast V.J.,
Bosman M.
Publication year - 2007
Publication title -
microscopy research and technique
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.536
H-Index - 118
eISSN - 1097-0029
pISSN - 1059-910X
DOI - 10.1002/jemt.20407
Subject(s) - electron energy loss spectroscopy , spectroscopy , resolution (logic) , spectrometer , imaging spectroscopy , spectral line , electron spectroscopy , energy (signal processing) , optics , electron microscope , electron , energy dispersive x ray spectroscopy , physics , materials science , computer science , scanning electron microscope , artificial intelligence , transmission electron microscopy , nuclear physics , quantum mechanics , astronomy
Abstract In the electron microscope, spectroscopic signals such as the characteristic X‐rays or the energy loss of the incident beam can provide an analysis of the local composition or electronic structure. Recent improvements in the energy resolution and sensitivity of electron spectrometers have improved the quality of spectra that can be obtained. Concurrently, the calculations used to simulate and interpret spectra have made major advances. These developments will be briefly reviewed. In recent years, the focus of analytical electron microscopy has moved away from single spectrum acquisition to mapping and imaging. In particular, the use of spectrum imaging (SI), where a full spectrum is acquired and stored at each pixel in the image is becoming widespread. A challenge for the application of spectrum imaging is the processing of such large datasets in order to extract the significant information. When we go beyond the mapping of composition and look to map bonding and electronic structure this becomes both more important and more difficult. Approaches to processing spectrum imaging data sets acquired using electron energy loss spectroscopy (EELS) will be explored in this paper. Microsc. Res. Tech., 2007. © 2007 Wiley‐Liss, Inc.